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  Subjects -> CHEMISTRY (Total: 845 journals)
    - ANALYTICAL CHEMISTRY (51 journals)
    - CHEMISTRY (595 journals)
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    - INORGANIC CHEMISTRY (41 journals)
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    - PHYSICAL CHEMISTRY (67 journals)

CHEMISTRY (595 journals)                  1 2 3 | Last

Showing 1 - 200 of 735 Journals sorted alphabetically
2D Materials     Hybrid Journal   (Followers: 8)
Accreditation and Quality Assurance: Journal for Quality, Comparability and Reliability in Chemical Measurement     Hybrid Journal   (Followers: 26)
ACS Catalysis     Full-text available via subscription   (Followers: 34)
ACS Chemical Neuroscience     Full-text available via subscription   (Followers: 18)
ACS Combinatorial Science     Full-text available via subscription   (Followers: 23)
ACS Macro Letters     Full-text available via subscription   (Followers: 24)
ACS Medicinal Chemistry Letters     Full-text available via subscription   (Followers: 39)
ACS Nano     Full-text available via subscription   (Followers: 245)
ACS Photonics     Full-text available via subscription   (Followers: 11)
ACS Synthetic Biology     Full-text available via subscription   (Followers: 21)
Acta Chemica Iasi     Open Access   (Followers: 2)
Acta Chimica Sinica     Full-text available via subscription   (Followers: 1)
Acta Chimica Slovaca     Open Access   (Followers: 1)
Acta Chromatographica     Full-text available via subscription   (Followers: 9)
Acta Facultatis Medicae Naissensis     Open Access  
Acta Metallurgica Sinica (English Letters)     Hybrid Journal   (Followers: 5)
Acta Scientifica Naturalis     Open Access   (Followers: 2)
adhäsion KLEBEN & DICHTEN     Hybrid Journal   (Followers: 5)
Adhesion Adhesives & Sealants     Hybrid Journal   (Followers: 8)
Adsorption Science & Technology     Full-text available via subscription   (Followers: 5)
Advanced Functional Materials     Hybrid Journal   (Followers: 51)
Advanced Science Focus     Free   (Followers: 3)
Advances in Chemical Engineering and Science     Open Access   (Followers: 56)
Advances in Chemical Science     Open Access   (Followers: 13)
Advances in Chemistry     Open Access   (Followers: 15)
Advances in Colloid and Interface Science     Full-text available via subscription   (Followers: 18)
Advances in Drug Research     Full-text available via subscription   (Followers: 22)
Advances in Enzyme Research     Open Access   (Followers: 9)
Advances in Fluorine Science     Full-text available via subscription   (Followers: 8)
Advances in Fuel Cells     Full-text available via subscription   (Followers: 16)
Advances in Heterocyclic Chemistry     Full-text available via subscription   (Followers: 9)
Advances in Materials Physics and Chemistry     Open Access   (Followers: 21)
Advances in Nanoparticles     Open Access   (Followers: 15)
Advances in Organometallic Chemistry     Full-text available via subscription   (Followers: 15)
Advances in Polymer Science     Hybrid Journal   (Followers: 41)
Advances in Protein Chemistry     Full-text available via subscription   (Followers: 17)
Advances in Protein Chemistry and Structural Biology     Full-text available via subscription   (Followers: 20)
Advances in Quantum Chemistry     Full-text available via subscription   (Followers: 5)
Advances in Science and Technology     Full-text available via subscription   (Followers: 12)
African Journal of Bacteriology Research     Open Access  
African Journal of Chemical Education     Open Access   (Followers: 2)
African Journal of Pure and Applied Chemistry     Open Access   (Followers: 7)
Agrokémia és Talajtan     Full-text available via subscription   (Followers: 2)
Alkaloids: Chemical and Biological Perspectives     Full-text available via subscription   (Followers: 3)
AMB Express     Open Access   (Followers: 1)
Ambix     Hybrid Journal   (Followers: 3)
American Journal of Biochemistry and Biotechnology     Open Access   (Followers: 67)
American Journal of Biochemistry and Molecular Biology     Open Access   (Followers: 14)
American Journal of Chemistry     Open Access   (Followers: 27)
American Journal of Plant Physiology     Open Access   (Followers: 14)
American Mineralogist     Hybrid Journal   (Followers: 14)
Analyst     Full-text available via subscription   (Followers: 40)
Angewandte Chemie     Hybrid Journal   (Followers: 193)
Angewandte Chemie International Edition     Hybrid Journal   (Followers: 218)
Annales UMCS, Chemia     Open Access   (Followers: 1)
Annals of Clinical Chemistry and Laboratory Medicine     Open Access   (Followers: 4)
Annual Reports in Computational Chemistry     Full-text available via subscription   (Followers: 3)
Annual Reports Section A (Inorganic Chemistry)     Full-text available via subscription   (Followers: 4)
Annual Reports Section B (Organic Chemistry)     Full-text available via subscription   (Followers: 8)
Annual Review of Chemical and Biomolecular Engineering     Full-text available via subscription   (Followers: 12)
Annual Review of Food Science and Technology     Full-text available via subscription   (Followers: 15)
Anti-Infective Agents     Hybrid Journal   (Followers: 3)
Antiviral Chemistry and Chemotherapy     Hybrid Journal  
Applied Organometallic Chemistry     Hybrid Journal   (Followers: 7)
Applied Spectroscopy     Full-text available via subscription   (Followers: 23)
Applied Surface Science     Hybrid Journal   (Followers: 28)
Arabian Journal of Chemistry     Open Access   (Followers: 6)
ARKIVOC     Open Access   (Followers: 2)
Asian Journal of Biochemistry     Open Access   (Followers: 1)
Atomization and Sprays     Full-text available via subscription   (Followers: 4)
Australian Journal of Chemistry     Hybrid Journal   (Followers: 7)
Autophagy     Hybrid Journal   (Followers: 2)
Avances en Quimica     Open Access   (Followers: 1)
Biochemical Pharmacology     Hybrid Journal   (Followers: 10)
Biochemistry     Full-text available via subscription   (Followers: 309)
Biochemistry Insights     Open Access   (Followers: 6)
Biochemistry Research International     Open Access   (Followers: 6)
BioChip Journal     Hybrid Journal  
Bioinorganic Chemistry and Applications     Open Access   (Followers: 9)
Bioinspired Materials     Open Access   (Followers: 5)
Biointerface Research in Applied Chemistry     Open Access   (Followers: 2)
Biointerphases     Open Access   (Followers: 1)
Biology, Medicine, & Natural Product Chemistry     Open Access   (Followers: 1)
Biomacromolecules     Full-text available via subscription   (Followers: 19)
Biomass Conversion and Biorefinery     Partially Free   (Followers: 10)
Biomedical Chromatography     Hybrid Journal   (Followers: 6)
Biomolecular NMR Assignments     Hybrid Journal   (Followers: 3)
BioNanoScience     Partially Free   (Followers: 5)
Bioorganic & Medicinal Chemistry     Hybrid Journal   (Followers: 117)
Bioorganic & Medicinal Chemistry Letters     Hybrid Journal   (Followers: 91)
Bioorganic Chemistry     Hybrid Journal   (Followers: 10)
Biopolymers     Hybrid Journal   (Followers: 18)
Biosensors     Open Access   (Followers: 2)
Biotechnic and Histochemistry     Hybrid Journal   (Followers: 1)
Bitácora Digital     Open Access  
Boletin de la Sociedad Chilena de Quimica     Open Access  
Bulletin of the Chemical Society of Ethiopia     Open Access   (Followers: 2)
Bulletin of the Chemical Society of Japan     Full-text available via subscription   (Followers: 24)
Bulletin of the Korean Chemical Society     Hybrid Journal   (Followers: 1)
C - Journal of Carbon Research     Open Access   (Followers: 3)
Cakra Kimia (Indonesian E-Journal of Applied Chemistry)     Open Access  
Canadian Association of Radiologists Journal     Full-text available via subscription   (Followers: 3)
Canadian Journal of Chemistry     Hybrid Journal   (Followers: 10)
Canadian Mineralogist     Full-text available via subscription   (Followers: 4)
Carbohydrate Research     Hybrid Journal   (Followers: 26)
Carbon     Hybrid Journal   (Followers: 66)
Catalysis for Sustainable Energy     Open Access   (Followers: 7)
Catalysis Reviews: Science and Engineering     Hybrid Journal   (Followers: 8)
Catalysis Science and Technology     Free   (Followers: 7)
Catalysis Surveys from Asia     Hybrid Journal   (Followers: 3)
Catalysts     Open Access   (Followers: 8)
Cellulose     Hybrid Journal   (Followers: 7)
Cereal Chemistry     Full-text available via subscription   (Followers: 4)
ChemBioEng Reviews     Full-text available via subscription   (Followers: 1)
ChemCatChem     Hybrid Journal   (Followers: 8)
Chemical and Engineering News     Free   (Followers: 14)
Chemical Bulletin of Kazakh National University     Open Access  
Chemical Communications     Full-text available via subscription   (Followers: 72)
Chemical Engineering Research and Design     Hybrid Journal   (Followers: 24)
Chemical Research in Chinese Universities     Hybrid Journal   (Followers: 3)
Chemical Research in Toxicology     Full-text available via subscription   (Followers: 20)
Chemical Reviews     Full-text available via subscription   (Followers: 182)
Chemical Science     Open Access   (Followers: 22)
Chemical Technology     Open Access   (Followers: 16)
Chemical Vapor Deposition     Hybrid Journal   (Followers: 5)
Chemical Week     Full-text available via subscription   (Followers: 8)
Chemie in Unserer Zeit     Hybrid Journal   (Followers: 58)
Chemie-Ingenieur-Technik (Cit)     Hybrid Journal   (Followers: 26)
ChemInform     Hybrid Journal   (Followers: 8)
Chemistry & Biodiversity     Hybrid Journal   (Followers: 6)
Chemistry & Biology     Full-text available via subscription   (Followers: 30)
Chemistry & Industry     Hybrid Journal   (Followers: 5)
Chemistry - A European Journal     Hybrid Journal   (Followers: 147)
Chemistry - An Asian Journal     Hybrid Journal   (Followers: 15)
Chemistry and Materials Research     Open Access   (Followers: 20)
Chemistry Central Journal     Open Access   (Followers: 4)
Chemistry Education Research and Practice     Free   (Followers: 5)
Chemistry in Education     Open Access   (Followers: 9)
Chemistry International     Hybrid Journal   (Followers: 2)
Chemistry Letters     Full-text available via subscription   (Followers: 44)
Chemistry of Materials     Full-text available via subscription   (Followers: 251)
Chemistry of Natural Compounds     Hybrid Journal   (Followers: 9)
Chemistry World     Full-text available via subscription   (Followers: 22)
Chemistry-Didactics-Ecology-Metrology     Open Access   (Followers: 1)
ChemistryOpen     Open Access   (Followers: 2)
Chemkon - Chemie Konkret, Forum Fuer Unterricht Und Didaktik     Hybrid Journal  
Chemoecology     Hybrid Journal   (Followers: 4)
Chemometrics and Intelligent Laboratory Systems     Hybrid Journal   (Followers: 15)
Chemosensors     Open Access  
ChemPhysChem     Hybrid Journal   (Followers: 9)
ChemPlusChem     Hybrid Journal   (Followers: 2)
ChemTexts     Hybrid Journal  
CHIMIA International Journal for Chemistry     Full-text available via subscription   (Followers: 2)
Chinese Journal of Chemistry     Hybrid Journal   (Followers: 6)
Chinese Journal of Polymer Science     Hybrid Journal   (Followers: 10)
Chromatographia     Hybrid Journal   (Followers: 24)
Clay Minerals     Full-text available via subscription   (Followers: 10)
Cogent Chemistry     Open Access  
Colloid and Interface Science Communications     Open Access  
Colloid and Polymer Science     Hybrid Journal   (Followers: 10)
Colloids and Surfaces B: Biointerfaces     Hybrid Journal   (Followers: 7)
Combinatorial Chemistry & High Throughput Screening     Hybrid Journal   (Followers: 4)
Combustion Science and Technology     Hybrid Journal   (Followers: 18)
Comments on Inorganic Chemistry: A Journal of Critical Discussion of the Current Literature     Hybrid Journal   (Followers: 2)
Composite Interfaces     Hybrid Journal   (Followers: 6)
Comprehensive Chemical Kinetics     Full-text available via subscription   (Followers: 2)
Comptes Rendus Chimie     Full-text available via subscription  
Comptes Rendus Physique     Full-text available via subscription   (Followers: 1)
Computational and Theoretical Chemistry     Hybrid Journal   (Followers: 9)
Computational Biology and Chemistry     Hybrid Journal   (Followers: 12)
Computational Chemistry     Open Access   (Followers: 2)
Computers & Chemical Engineering     Hybrid Journal   (Followers: 9)
Coordination Chemistry Reviews     Full-text available via subscription   (Followers: 3)
Copernican Letters     Open Access   (Followers: 1)
Critical Reviews in Biochemistry and Molecular Biology     Hybrid Journal   (Followers: 5)
Crystal Structure Theory and Applications     Open Access   (Followers: 4)
CrystEngComm     Full-text available via subscription   (Followers: 13)
Current Catalysis     Hybrid Journal   (Followers: 2)
Current Metabolomics     Hybrid Journal   (Followers: 5)
Current Opinion in Colloid & Interface Science     Hybrid Journal   (Followers: 9)
Current Opinion in Molecular Therapeutics     Full-text available via subscription   (Followers: 17)
Current Research in Chemistry     Open Access   (Followers: 8)
Current Science     Open Access   (Followers: 61)
Dalton Transactions     Full-text available via subscription   (Followers: 23)
Detection     Open Access   (Followers: 2)
Developments in Geochemistry     Full-text available via subscription   (Followers: 2)
Diamond and Related Materials     Hybrid Journal   (Followers: 12)
Dislocations in Solids     Full-text available via subscription  
Doklady Chemistry     Hybrid Journal  
Drying Technology: An International Journal     Hybrid Journal   (Followers: 4)
Eclética Química     Open Access   (Followers: 1)
Ecological Chemistry and Engineering S     Open Access   (Followers: 3)
Ecotoxicology and Environmental Contamination     Open Access  
Educación Química     Open Access   (Followers: 1)
Education for Chemical Engineers     Hybrid Journal   (Followers: 5)
EJNMMI Radiopharmacy and Chemistry     Open Access  
Elements     Full-text available via subscription   (Followers: 3)
Environmental Chemistry     Hybrid Journal   (Followers: 7)
Environmental Chemistry Letters     Hybrid Journal   (Followers: 4)
Environmental Science & Technology Letters     Full-text available via subscription   (Followers: 5)

        1 2 3 | Last

Journal Cover Chemical Vapor Deposition
  [SJR: 0.691]   [H-I: 51]   [5 followers]  Follow
    
   Hybrid Journal Hybrid journal (It can contain Open Access articles)
   ISSN (Print) 0948-1907 - ISSN (Online) 1521-3862
   Published by John Wiley and Sons Homepage  [1579 journals]
  • Cover image from G. Malandrino and co-workers (Chem. Vap. Deposition 2015,
           21, 319)
    • Abstract: A field-emission scanning electron microscopy image showing a desert rose-like aggregation found as outgrowth on the homogeneous morphology of a VO2 (B) phase film grown at 200 °C by MOCVD.
      PubDate: 2015-12-17T10:59:59.959367-05:
      DOI: 10.1002/cvde.201571011
       
  • Chem. Vap. Deposition (10–11–12/2015)
    • PubDate: 2015-12-17T10:59:56.058881-05:
      DOI: 10.1002/cvde.201571012
       
  • Chem. Vap. Deposition (10–11–12/2015)
    • Pages: 207 - 212
      PubDate: 2015-12-17T10:59:58.592722-05:
      DOI: 10.1002/cvde.201571013
       
  • Farewell and Welcome
    • Authors: Michael L. Hitchman
      Pages: 213 - 215
      PubDate: 2015-12-17T10:59:54.836887-05:
      DOI: 10.1002/cvde.201502015
       
  • From V. B. Aleskovskii's “Framework” Hypothesis to the Method of
           Molecular Layering/Atomic Layer Deposition 
    • Authors: Anatolii A. Malygin; Victor E. Drozd, Anatolii A. Malkov, Vladimir M. Smirnov
      Pages: 216 - 240
      Abstract: This essay is dedicated to the history of creation and development of the molecular layering technique (ML) which, in the modern community of non-Russian scientists, is commonly referred to as atomic layer deposition (ALD). Basic research in the field of chemical transformations of solid surfaces using the ML method in the light of the “framework” hypothesis proposed by V. B. Aleskovskii in 1952 is discussed. A number of questions raised by international scientists including those involved in the Virtual Project on the History of ALD (VPHA, 2013), and scientists from conferences in Helsinki (Finland, May 2014.), Kyoto (Japan, June 2014), and personal communications amongst peers are addressed. For the first time in English, this article provides information about V. B. Aleskovskii and S. I. Kol'tsov who are closely associated with development of the ML technique in the Soviet Union. This paper also informs the scientific community about research groups currently engaged in ML research in Russia and introduces the scientific school of “Chemistry of highly organized substances”, founded and supervised by V. B. Aleskovskii.The history of creation and development of ALD, which has been known in the USSR-Russia as molecular layering technique (ML), is described. The “framework” hypothesis and its connection with principles of the method ML, provides information about the ML groups in Russia and their scientific results from the 1960s to the present time.
      PubDate: 2015-12-17T10:59:52.581117-05:
      DOI: 10.1002/cvde.201502013
       
  • CVD Growth of MoS2-based Two-dimensional Materials
    • Authors: H. F. Liu; S. L. Wong, D. Z. Chi
      Pages: 241 - 259
      Abstract: The ‘self-limiting’ character of graphene growth on the surface of metals such as Ni and Cu makes CVD the natural choice for growing large-area and continuous graphene films. Beyond graphene, absence of the self-limiting property results in a challenge to achieving large-area, high-quality two-dimensional (2D) crystals by CVD. Recent studies of structural, optical, and electrical properties of MoS2-based atomic layers grown by CVD are reviewed, concluding that thermal vapor deposition will outperform thermal vapor sulfurization in producing the required materials. Whether gaseous sources will replace the now dominant solid sources in direct deposition methods is an open issue. The latest progression in various CVD techniques used in MoS2 growth and their resultant products are discussed and compared.Recent studies of MoS2-based atomic layers grown by CVD are reviewed, suggesting that TVD will outperform TVS towards large-area, high-quality, 2D-MoS2. Whether gaseous sources will replace the now dominant solid sources in direct deposition is still an open issue. The latest progression in CVD for 2D-MoS2 nanosheets is discussed towards elucidating and helping better define future process optimizations.
      PubDate: 2015-11-13T06:04:33.23402-05:0
      DOI: 10.1002/cvde.201500060
       
  • Quantitative Measurement of Fiber Pull-out by Laser Scanning Confocal
           Microscopy 
    • Authors: Andreas Pfrang; Thomas Schimmel
      Pages: 260 - 262
      Abstract: Laser scanning confocal microscopy is demonstrated as a new method to quantitatively determine fiber pull-out length. Fracture surfaces of carbon/carbon composites – polyacrylonitrile (PAN)-based carbon fibers infiltrated with pyrolytic carbon – are investigated to measure the three-dimensional surface topography and thereby the distribution of fiber pull-out length of carbon fibers.
      PubDate: 2015-11-16T03:05:18.541201-05:
      DOI: 10.1002/cvde.201504334
       
  • Possible High Efficiency Platform for Biosensors Based on Optimum Physical
           Chemistry of Carbon Nanotubes 
    • Authors: Amin Termeh Yousefi; Hirofumi Tanaka, Samira Bagheri, Nahrizul Adib Kadri, Shoichiro Ikeda, Mohamad Rusop Mahmood, Mikio Miyake
      Pages: 263 - 266
      Abstract: Carbon nanotube (CNT)-based electrochemical biosensors are used to determine the concentration of analytes by measuring mass, heat, or oxygen. CNTs, as an immobilizing platform of biomaterials, play an important role in enhancing the electron transfer mechanism of a biosensor. The large surface area and optimum aspect ratio (length to thickness) of CNTs maximize the amount of immobilized biomaterials on the surface. In this study, various aspect ratios of CNTs are reported, based on the alteration of growth mechanisms using CVD. The growth-dependent and -independent parameters of the CNT arrays are studied as functions of the synthesis method.Full Paper: Different aspect ratios of CNTs are reported based on the alteration of growth temperature which may be a useful method of increasing the electron-relaying capacity of enzymatic biosensors due to the presence of the insulating, bulky enzyme molecules. Nanotubes are grown perpendicular to the surface of the silicon substrate in different aspect ratios according to the applied growth temperatures.
      PubDate: 2015-11-17T10:47:06.247108-05:
      DOI: 10.1002/cvde.201507184
       
  • Photo-oxidation of Polymers Synthesized by Plasma and Initiated CVD 
    • Authors: Salmaan H. Baxamusa; Aravind Suresh, Paul Ehrmann, Ted Laurence, Jiries Hanania, Jeff Hayes, Stephen Harley, Daniel D. Burkey
      Pages: 267 - 274
      Abstract: Plasma polymers are often limited by their susceptibility to spontaneous and photo-oxidation. We show that the unusual photoluminescence (PL) behavior of a plasma polymer of trans-2-butene is correlated with its PL strength. These photo-processes occur under blue light illumination (λ = 405 nm), distinguishing them from traditional ultraviolet degradation of polymers. These photo-active defects are likely formed during the plasma deposition process, and we show that a polymer synthesized using initiated (i)CVD, a non-plasma method, has 1000× lower PL signal and enhanced photo-stability. Non-plasma methods, such as iCVD, may therefore be a route to overcoming material aging issues that limit the adoption of plasma polymers.The photo-oxidative stability of hydrocarbon polymers deposited via plasma and iCVD is compared. The plasma polymer has an unusually strong and broad PL emission when excited with blue light. The strength of the PL is correlated with its rate of photo-oxidation under blue light illumination. The iCVD polymer has 1000× weaker PL signal and is far more photo-stable.
      PubDate: 2015-11-09T05:45:34.035484-05:
      DOI: 10.1002/cvde.201507173
       
  • OMCVD Gold Nanoparticles Covalently Attached to Polystyrene for Biosensing
           Applications 
    • Authors: Sivayini Kandeepan; Joseph A. Paquette, Joe B. Gilroy, Silvia Mittler
      Pages: 275 - 280
      Abstract: Remarkable developments and successes are witnessed in the fabrication and implementation of optical sensors based on localized surface plasmon resonance (LSPR) for the investigation of chemical and biological material quantities. We report on the reproducible fabrication of chemically stable surface immobilized AuNPs grown via organometallic chemical vapor deposition (OMCVD) on a polymer substrate, namely polystyrene (PS). Oxygen plasma-treated and UV ozone-treated PS samples depict enhanced amounts of polar -OH groups allowing for nucleation and growth of AuNPs. The optimum plasma treatment conditions, the largest shifts in the LSPR curves, and the bulk sensitivity of the OMCVD-grown AuNPs are discussed.OMCVD growth at low temperature of gold nanoparticles (AuNPs) is demonstrated on PS substrates. The PS is oxygen plasma- or UV ozone-treated to increase the number of surface -OH groups for nucleation and growth. The SEM image depicts a typical AuNP distribution, size and location, on a PS substrate with enhanced -OH functionalities. A higher FOM for bulk sensing was achieved.
      PubDate: 2015-11-17T10:47:26.423502-05:
      DOI: 10.1002/cvde.201507177
       
  • A Facile Route to Thin Films of Zinc Carbodiimide Using Aerosol-assisted
           CVD
    • Authors: Karl M. Kaye; William Grantham, Geoffrey Hyett
      Pages: 281 - 287
      Abstract: There has been a resurgence of interest in metal carbodiimides in recent years and in this paper we present a route to the synthesis of one of these phases, zinc carbodiimide, previously known as zinc cyanamide, in the form of a sub-micrometer thin film, using aerosol-assisted (AA)CVD from a solution of zinc acetate and urea in methanol, with the carbodiimide ion being formed from the decomposition of the urea molecule. Thin film synthesis is achieved over a deposition temperature range 375 − 500 °C, with a minimum ratio of urea to zinc acetate of 2:1 and a maximum of 5:1 established as viable for film formation. This work presents the first example of the synthesis of a ZnNCN thin film, or indeed any metal carbodiimide thin film, using a CVD technique.The concerted aerosol-assisted CVD reaction of urea and zinc acetate in methanol enables the formation of zinc carbodiimide thin films. This can be achieved over a substrate temperature range of 375 to 500 °C with a minimum excess of 2 mol eq. of urea needed for pure ZnNCN, and an excess of up to 5 mol eq. tested.
      PubDate: 2015-11-10T11:12:01.131838-05:
      DOI: 10.1002/cvde.201507179
       
  • Uniform Coating of Microparticles using CVD Polymerization 
    • Authors: Yu Liang; Jacob H. Jordahl, Hao Ding, Xiaopei Deng, Joerg Lahann
      Pages: 288 - 293
      Abstract: A modified fluidized bed reactor is developed to homogenously coat micrometer-sized particles with reactive polymer films using CVD. This technique is found to be rapid (∼30 min per batch) and scalable (up to 1 g particles), and can create homogenous coatings on microparticles down to 10 μm in diameter. By tuning critical variables, such as working pressure and the carrier gas flow rate, full coverage of a reactive polymer film can be realized. Janus particles are synthesized and can be visualized via fluorescence microscopy.A custom-designed fluidized bed reactor is attached to the outlet of a CVD polymerization system, thereby imparting chemical functionality on the surface of microparticles. Functional polymer films are shown to fully coat the 3D surface of particles. This technique, in concert with metal deposition, produces Janus particles. These coated particles have a wide range of potential uses in biotechnology.
      PubDate: 2015-11-23T03:22:18.130879-05:
      DOI: 10.1002/cvde.201507197
       
  • PECVD of Hematite Nanoblades and Nanocolumns: Synthesis, Characterization,
           and Growth Model 
    • Authors: Giorgio Carraro; Alberto Gasparotto, Chiara Maccato, Elza Bontempi, Davide Barreca
      Pages: 294 - 299
      Abstract: Fe2O3 nanostructures are fabricated on Si(100) and SiO2 by plasma enhanced (PE)CVD from a FeIII β-diketonate precursor. Depositions are carried out in Ar-O2 plasmas, devoting particular attention to the influence of growth temperature (from 60 to 400 °C) on material chemico-physical properties. Remarkably, high purity, single-phase α-Fe2O3 nanostructures are obtained at temperatures as low as 60 °C. Furthermore, the deposit nano-organization can be tuned from -oriented 2D nanoblade arrays to denser nanocolumns upon increasing the deposition temperature. A possible growth model is proposed to account for the observed structural/morphological features and light absorption properties of the target materials.The effect of growth temperature (60–400 °C) on the structure, morphology, and optical properties of iron(III) oxide nanosystems fabricated by PECVD starting from Fe(dpm)3 is reported. The obtaining of single-phase α-Fe2O3 nanoblade/columnar arrays with tailored structural and optical properties is successfully demonstrated, proposing a suitable growth model accounting for the presented results.
      PubDate: 2015-11-16T03:02:08.09427-05:0
      DOI: 10.1002/cvde.201507182
       
  • Hybrid Synergic Methodology to Prepare ALD Honey-Comb Anatase Films
    • Authors: Francesca Visentin; Naida El Habra, Monica Favaro, Simone Battiston, Rosalba Gerbasi, Laura Crociani, Alessandro Galenda
      Pages: 300 - 306
      Abstract: Macroporous inorganic structures with high surface-to-volume ratio have been recognized as a centre of interest in many fields. Here, attention is focused on a hybrid synergic methodology to prepare honey-comb (HC) anatase TiO2 films with increased specific surface area. The breath figures (BFs) method is exploited to produce HC polystyrene (PS) templates and atomic layer deposition (ALD) is used to conformally cover them with a TiO2 coating. Different approaches are tested to preserve the HC-TiO2 structure during the conversion of the hybrid organic/inorganic materials into crystalline anatase films. Best results are obtained operating with ALD at 180 °C on pre-UV cross-linked substrates.A hybrid synergic methodology to prepare honey–comb (HC) anatase TiO2 films with increased specific surface area is presented. The breath figures method is used to produce HC polystyrene templates and atomic layer deposition is used to conformally cover them with a TiO2 coating. Different approaches are tested to preserve the HC-TiO2 structure during the conversion of the hybrid organic/inorganic materials into HC-crystalline anatase films.
      PubDate: 2015-11-10T11:11:43.050675-05:
      DOI: 10.1002/cvde.201507183
       
  • Silicon Oxycarbide Films Produced by Remote Microwave Hydrogen Plasma CVD
           using a Tetramethyldisiloxane Precursor: Growth Kinetics, Structure,
           Surface Morphology, and Properties 
    • Authors: Aleksander M. Wrobel; Pawel Uznanski, Agnieszka Walkiewicz-Pietrzykowska
      Pages: 307 - 318
      Abstract: Amorphous hydrogenated silicon oxycarbide (a-SiCO:H) thin films are produced by remote microwave hydrogen plasma CVD using 1,1,3,3-tetramethyldisiloxane precursor. The effect of substrate temperature (TS) on the chemical structure and some properties of resulting a-SiCO:H films is reported. The examination performed by infrared spectroscopy revealed that the increase in TS involves the elimination of organic moieties from the film and its transformation from polymer-like to ceramic-like high-crosslink-density material. Due to their small surface roughness, high density, and good optical transparency, the a-SiCO:H films seem to be useful coatings for optical and electronic devices.The a-SiCO:H films produced by the remote hydrogen plasma CVD from a tetramethyldisiloxane precursor at different substrate temperature (TS = 30–350 °C) are examined in terms of their growth kinetics, surface morphology, density, refractive index, optical absorption coefficient, optical bandgap, and photoluminescence. The relationships between the structural parameters of the films (controlled by TS) and their properties were determined. Their small surface roughness, high density, and good optical transparency make them seem to be useful coatings for optical devices.
      PubDate: 2015-11-17T10:46:47.904666-05:
      DOI: 10.1002/cvde.201507185
       
  • Phase-selective Route to V-O Film Formation: A Systematic MOCVD Study Into
           the Effects of Deposition Temperature on Structure and Morphology 
    • Authors: Simon F. Spanò; Roberta G. Toro, Guglielmo G. Condorelli, Grazia M. L. Messina, Giovanni Marletta, Graziella Malandrino
      Pages: 319 - 326
      Abstract: A systematic study into the MOCVD of V-O films using the vanadyl-acetylacetonate [VO(acac)2] precursor is carried out. The films are prepared via low pressure MOCVD on Si(001) substrates. The nature and quality of films are examined by varying operational parameters, e.g., deposition temperature, precursor vaporization rate, and flow of oxygen reacting gas. X-ray diffraction data point to the formation of crystalline films in the range 200−550 °C. Outside of this temperature ranges amorphous phases were obtained. Field-emission scanning electron microscope (FESEM) images indicate very homogeneous surfaces with grain shape and dimensions depending on operational conditions. Energy dispersive X-ray (EDX) and X-ray photoelectron spectroscopy (XPS) analyses point to the absence of any C contamination.A systematic study is carried out into the MOCVD of V-O films using the vanadyl-acetylacetonate precursor on a Si(001) substrate. XRD data point to the formation of crystalline films in the range 200–550 °C, with different phases forming within the investigated range.
      PubDate: 2015-11-23T03:22:58.835734-05:
      DOI: 10.1002/cvde.201507186
       
  • CVD Deposited Titania Thin Films for Gas Sensors with Improved Operating
           Characteristics
    • Authors: Marina V. Baryshnikova; Leonid A. Filatov, Andrey S. Petrov, Sergey E. Alexandrov
      Pages: 327 - 333
      Abstract: This paper describes the results of experimental evaluation of titanium dioxide thin films formed by CVD as active layers in semiconductor, resistive sensors for detection of ethanol vapors. TiO2 layers with a thickness of 90 nm are formed by CVD in the TTIP-O2-O3-Ar reaction system. Sensors manufactured with titania films formed under all the deposition conditions studied exhibit good electrical response to the ethanol vapors, with quick response-recovery characteristics in the temperature range 170–300 °C. Sensor performance is determined by the relative amount of anatase phase and grain size in the films. The response value (Rair/Rethanol) of the sample with the highest degree of crystallinity reached 37 at an operating temperature of 200 °C.An experimental evaluation of TiO2 thin films formed by CVD as active layers in semiconductor, resistive sensors for detection of ethanol vapors. Sensors produced on the basis of titania films containing the highest amount of anatase phase and with the lowest grain size (a typical SEM image is shown) are characterized by highest values of response and shortest response-recovery times.
      PubDate: 2015-11-23T03:22:39.715345-05:
      DOI: 10.1002/cvde.201507187
       
  • Chem. Vap. Deposition (10–11–12/2015)
    • Pages: 334 - 334
      Abstract: Metal-organic CVD of Y2O3 Thin Films using Yttrium tris-amidinates By S. Karle, V.-S. Dang, M. Prenzel, D. Rogalla, H.-W. Becker, A. Devi
      PubDate: 2015-12-17T10:59:58.561892-05:
      DOI: 10.1002/cvde.201571014
       
  • Metal-organic CVD of Y2O3 Thin Films using Yttrium tris-amidinates 
    • Authors: Sarah Karle; Van-Son Dang, Marina Prenzel, Detlef Rogalla, Hans-Werner Becker, Anjana Devi
      Pages: 335 - 342
      Abstract: Thin films of Y2O3 are deposited on Si(100) and Al2O3 (0001) substrates via metal-organic (MO)CVD for the first time using two closely related yttrium tris-amidinate compounds as precursors in the presence of oxygen in the temperature range 400–700 °C. The structural, morphological, and compositional features of the films are investigated in detail. At deposition temperatures of 500 °C and higher both the precursors yield polycrystalline Y2O3 thin films in the cubic phase. The compositional analysis revealed the formation of nearly stoichiometric Y2O3. The optical band gaps are estimated using UV-Vis spectroscopy. Preliminary electrical measurements are performed in the form of a metal oxide semiconductor (MOS) structure of Al/Y2O3/p-Si/Ag. Leakage currents and dielectric constants are also determined.Y2O3 thin films are grown by MOCVD at 400–700 °C using yttrium amidinate presursors in the presence of oxygen. The films, which are polycrystalline in case of deposition temperatures > 400 °C, are dense and exhibit good purity and homogeneity.
      PubDate: 2015-11-19T03:18:26.764399-05:
      DOI: 10.1002/cvde.201507189
       
  • A Process-Structure Investigation of Aluminum Oxide and Oxycarbide Thin
           Films prepared by Direct Liquid Injection CVD of Dimethylaluminum
           Isopropoxide (DMAI) 
    • Authors: Loïc Baggetto; Cédric Charvillat, Jérôme Esvan, Yannick Thébault, Diane Samélor, Hugues Vergnes, Brigitte Caussat, Alain Gleizes, Constantin Vahlas
      Pages: 343 - 351
      Abstract: We present the direct liquid injection CVD of aluminum oxide and oxycarbide thin films using dimethylaluminum isopropoxide at high process temperature (500–700 °C) with the addition of O2 gas, and at low temperature (150–300 °C) with the addition of H2O vapor. Very smooth films with typical roughness values lower than 2 nm are obtained. The thin films are composed of an amorphous material. The composition evolves as a function of temperature from that of a partial hydroxide to a stoichiometric oxide at low deposition temperature (150–300 °C), and from that of a stoichiometric oxide to a mixture of an oxide with an (oxy) carbide at higher temperature (500–700 °C).The DLI CVD of aluminum oxide and oxycarbide thin films using dimethylaluminum isopropoxide at high process temperature with O2 gas and at low temperature with H2O vapor is presented. Tuning the process conditions (temperature, co-reactant) allows to control the composition and film properties to obtain partially hydroxylated alumina, stoichiometric alumina or oxycarbide materials.
      PubDate: 2015-11-10T11:11:22.944858-05:
      DOI: 10.1002/cvde.201507190
       
  • Ozone-Based Atomic Layer Deposition of Gd2O3 from
           Tris(isopropyl-cyclopentadienyl)gadolinium: Growth Characteristics and
           Surface Chemistry
    • Authors: Jeong Hwan Han; Annelies Delabie, Alexis Franquet, Thierry Conard, Sven Van Elshocht, Christoph Adelmann
      Pages: 352 - 359
      Abstract: The atomic layer deposition (ALD) of Gd2O3 from tris(isopropyl-cyclopentadienyl) gadolinium (Gd(iPrCp)3) and O3 is studied as a function of the O2/N2 ratio used to generate O3. ALD using O3 with low N2 content leads to the formation of a hydroxyl-terminated surface after combustion reactions during O3 exposure followed by proton transfer and ligand release during the Gd(iPrCp)3 half cycle. This condition leads to the presence of parasitic chemical vapor deposition (CVD) due to the hygroscopicity of Gd2O3. By contrast, long O3 pulses with high N2 content lead to the dehydroxylation of the surface and to the suppression of both the proton transfer during the Gd(iPrCp)3 half cycle as well as the parasitic CVD reactions.The atomic layer deposition of Gd2O3 from Gd(iPrCp)3 and O3 is studied using in situ quadrupole mass spectrometry. O3 with low N2 content leads to the formation of a hydroxyl–terminated surface after combustion reactions with O3 followed by proton transfer and ligand release during Gd(iPrCp)3 chemisorption. By contrast, O3 with high N2 content leads to the dehydroxylation of the surface and the suppression of the proton transfer.
      PubDate: 2015-11-10T11:10:41.890209-05:
      DOI: 10.1002/cvde.201507196
       
  • Electric-Field Aerosol-Assisted CVD: Synthesis, Characterization, and
           Properties of Tin Oxide Microballs Prepared from a Single Source
           Precursor 
    • Authors: Rabia Naeem; Sohail Ahmed, Kong Mun Lo, Wan Jefrey Basirun, Rosiyah Yahya, Misni Misran, T. A. Nirmal Peiris, Jagdeep S. Sagu, K. G. Upul Wijayantha, Arjun K. Thapa, Gamini U. Sumanasekera, Muhammad Mazhar
      Pages: 360 - 368
      Abstract: Mesoporous nanostructures of tin(IV) oxide microballs are synthesized, using a single source precursor [Sn (OAc)(dmae)]2 (where OAc = Acetato and dmae = dimethylaminoethanolato). The as-prepared microballs are characterized using X-ray diffraction, field emission scanning electron microscopy (FESEM), Fourier transform infrared and UV-vis spectroscopy, X-ray photoelectron spectroscopy and impedance spectroscopy. The focused ion beam (FIB) images of the exterior and interior surfaces of the microballs disclosed the presence of porous structures with mesopore of sizes ranging from 56-66 nm and 8.0 to 160 nm, respectively. The microballs exhibit high BET and Langmuir surface areas of 136 and 191.6 m2 g−1, respectively, and show capacities >600 mAhg−1 over 60 cycles, as compared with unmodified tin oxide-based nanomaterials which show capacity < 500 mAh g−1 after 50 cycles.Mesoporous Sn (IV) oxide nanostructures with a Langmuir surface area of 191 m2 g−1 and mesopore size range from 56 to 66 nm and 8 to 160 nm in exterior and interior surfaces, respectively, are prepared by electric–field-directed aerosol-assisted CVD and tested for highly reversible cycling stability for application in lithium ion batteries.
      PubDate: 2015-11-12T11:24:35.834962-05:
      DOI: 10.1002/cvde.201507178
       
  • Electrochemical Performance of Vanadium Oxide Coatings Grown using
           Atmospheric Pressure CVD
    • Authors: Dimitra Vernardou; Maria Apostolopoulou, Dimitris Louloudakis, Nikolaos Katsarakis, Emmanouil Koudoumas
      Pages: 369 - 374
      Abstract: The growth of vanadium dioxide is carried out using chemical vapor deposition with N2 flow rates of 1, 1.4 and 2.2 L min−1 through the vanadium precursor bubbler. The presence of both monoclinic and metastable vanadium dioxide phases with the co-existence of nanocrystallites and outgrowths on the coating surface is observed for the 1 L min−1. Additionally, the electrochemical performance for this sample is enhanced and the specific discharge capacity was the highest presenting capacitance retention of 97% after 500 scans. Finally, it is found that the diffusion of Li+ through the cathode/electrolyte interface is easier enhancing its capacitive performance.Atmospheric pressure chemical vapor deposition of vanadium dioxide using different N2 flow rates through the vanadium precursor bubbler is performed. The lowest flow rate exhibits the presence of both monoclinic and metastable phases and consequently the co–existence of both nanocrystallites and outgrowths on the coating suface. It presents an enhanced electrochemical performance with a discharge specific capacity of 425 mAh g−1 and a capacitance retention after 500 scans.
      PubDate: 2015-11-10T11:11:01.58165-05:0
      DOI: 10.1002/cvde.201507193
       
  • Numerical Modeling of the Droplet Vaporization for Design and Operation of
           Liquid-pulsed CVD 
    • Authors: Raphaël Boichot; Susan Krumdieck
      Pages: 375 - 384
      Abstract: This article presents an approach for modeling the vaporization of droplets of solvent and precursor mixture under vacuum in the pulsed-pressure (pp) CVD process. The pulsed, direct liquid injection apparatus with ultrasonic atomizer is demonstrated as a controllable and reliable alternative to the bubbler and carrier gas system. The numerical modeling solves mass, heat, and momentum continuity equations on liquid droplets, and is intended to evaluate the relative roles of the physical chemistry properties and reactor parameters in the fast vaporization of droplets. The sensitivity analysis proposed here shows that the vaporization time into the pulsed-liquid CVD system is mainly dependent on the heating available in the flash evaporation zone, then on the thermodynamic properties of the liquid solution.The pulsed pressure CVD process using a liquid precursor droplet spray is assessed by numerical simulation. The main parameters impacting the vaporization time of the liquid droplet cloud are the enthalpies of vaporization and vapor pressures of the compounds in the mixture, the initial temperature and size of the droplets, and the temperature of the reactor wall.
      PubDate: 2015-11-19T03:18:05.688826-05:
      DOI: 10.1002/cvde.201507191
       
  • Numerical Modeling of the Droplet Vaporization for Design and Operation of
           Liquid-pulsed CVD
    • Authors: Raphaël Boichot; Susan Krumdieck
      Pages: 385 - 386
      PubDate: 2015-12-17T10:59:56.921312-05:
      DOI: 10.1002/cvde.201571015
       
 
 
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